News and Events
Invited lecture: 3D integration the building blocks of upcoming technologies
You are cordially invited to a lecture by Dr. Fabrice Nemouchi from CEA-LETI on Friday, the 20th of September. The title of the lecture is ' 3D integration the building blocks of upcoming technologies'. The abstract of the lecture and the short CV of Dr. Nemouchi are provided below.
Location: The seminar hall of the Solid-State Electronics division (house 2, floor 1)
Time: 9:00 (sharp), Friday, 20th of Septemebr
Host: Zhen Zhang
The microelectronics industry and CMOS devices development most particularly, encountered drastic challenges on the down scale route in order to fulfil the specific requests that lead to low voltage, low power consumption and/or high performance devices. Thus, continuous modifications of Front-end (FEOL) and Back-end of line (BEOL) have been implemented during the two past decades while the typical pitch size of the device dropped below 90 nm. Moreover, those evolutions offer new paradigms architecture based on the FinFet and FD-SOI CMOS. Since a decade, a strong interest was figure out for the use of the third dimension as enhancer of performance increasing the transistors density at a given node. Indeed, the so-called 3D monolithic architecture or CoolCubeTM, consists in stacking a second transistors level on top of previous FD-SOI MOS layer, benefits on substantial rise of device numbers by cm2. Furthermore, the reduction of interconnects length and associated parasitics granted by the CoolCubeTM technology enables slightly relaxing the transistor dimensions, which is a considerable asset when processing more exotic materials. However, such smart architecture comes across new challenges due to the thermal budget that first process steps of the top transistors inflict to bottom ones. Although the thermal processing of top transistors is currently restricted with the goal of limiting the bottom CMOS degradation, the source and drain contacts appear to be a weak point that required an accurate attention.
The different approaches have been studied and set up to establish the first 3D circuit with optimize performances on both CMOS tiers:
- Increase the stability of the bottom CMOS and especially focus on the effort salicide module, since it appears as the Achilles’ heel on the first Tiers. Large studies on silicidation process and material behaviors will be presented to stabilize the Si and SiGe metallization.
- Decrease the thermal budget required of the upper CMOS transistors processes such as Gate oxide annealing, dopant activation, spacer deposition, Source and drain epitaxies…
The presentation will focus on the main studies that was realized on the Si/SiGe 3D monolithic architecture so far.
In a second part, alternative channels could also be considers due to theirs mains properties. Indded, high mobility channels for advanced CMOS nodes have sparked significant interest over the past decade, since a larger drive current compared to Si-channel devices at a fixed gate overdrive allows maintaining the performance power dissipation trade-off while increasing circuit density. Based on their bulk electron and hole mobility, III-V materials (eg InGaAs) and Ge channels are generally considered among the most serious contenders, respectively for nFETs and pFETs. A 3D sequential integration with separately optimized nFET and pFET stages essentially boils down to solving issues of thermal budget compatibility between stages.
In this part, we will review some of the thermal budget constraints related to forming junctions on InGaAs and Ge (doping, epitaxy, intermetallic compound formation), and evaluate the corresponding impact on either a Ge-p-MOS-1st or III-V-nMOS-1st integration schemes.
10th European Kesterite+ workshop in Uppsala
The European Kesterite workshop has been an annual event since 2010, held in a number of institutions around Europe, and is now returning to Uppsala for its 10th anniversary. The workshop is a dedicated forum for dissemination and networking within the international community of researchers developing thin film solar cells based on earth-abundant inorganic materials. Kesterite, or copper-zinc-tin-sulfide/selenide, was one of the first and most promising semiconductor materials for this application, but this 10th anniversary workshop will also encompass other sulfide/selenide materials that have promise for enabling large scale, low-cost solar electricity generation without constraints from rare elements. As in past years, a “PhD day” will be organised by and for PhD students, focusing on education in chosen areas in research and career development relevant to kesterites, thin films and solar cells. More information and abstract submission: www.kesterite.eu
UU Workshop for Writing Successful MSCA IF Grant Proposals in Angstrom
The Marie Skłodowska-Curie Actions Individual Fellowship (MSCA IF) provides an allowance to cover most of the living costs and travel as well as family costs. In addition, the EU contributes to the training, networking and research costs of the fellow, as well as to the management and indirect costs of the project. The next deadline is 11 September 2019.
Marie Curie Workshop in 11 and 12 June 2019
This year Uppsala University is offering a MSCA IF workshop for applicants and their host/supervisor. This aim is to give the best support during the writing of the proposal and to make sure the applicant and the host/supervisor meet to commence the application process. One of the key success factors of a MSCA IF application is that the researcher and supervisor write the proposal together.
The workshop will last two days and we will give information about the key parts of the application. In addition, there will be time for the applicant and host to prepare the proposal.
Open Seminars on Enabling Technologies for biomedical applications, June 14, Angstrom
You are most welcome to the open Seminars on Enabling Technologies for biomedical applications organized by the Horizon 2020 project SINTEC-824984.
Friday, June 14th 2019 (Polhemssalen, Ångström Laboratory - ground floor)
Includes talks on Brain-inspired computation modelling, Microwave imaging, Plasmonic biosensors and Defibrillator
Please, reply to firstname.lastname@example.org to confirm your participation latest Monday June 10th 2019 23:59 hs.
FREIA - workshop on energy efficient RF power generation - Häggsalen June 18-20, 2019
FREIA organizes an international workshop on energy efficient RF power generation for particle accelerators.
The workshop will be held at Ångström, Häggsalen on June 18-20, 2019.
More information to be found here: https://indico.uu.se/event/515/ Welcome !
Disputation: Lukas Jablonka, ” Contacts and Interconnects for Germanium-based Monolithic 3D integrated Circuits”. 20 september
Disputation: Lukas Jablonka, ” Contacts and Interconnects for Germanium-based Monolithic 3D integrated Circuits”. 20 september, kl 13.15, Polhemsalen. Opponent: Fabrice Nemouchi, CEA-Leti, Frankrike.
Web link: Calendar.
Disputation: Jie Zhao,”Solution-Processable Conductive Graphene- Based Materials for Flexible Electronics. 12 June
Disputation: Xi Chen, ”Silicon Nanowire Field-Effect Devices as Low Noise Sensors”
Zhen Zhang has been promoted to professor. Congratulations!
Diploma thesis project
A 30 hp diploma thesis project on "High temperature transparent conductors for tandem solar cells" is currently available.
Oscarspriset till Jonathan Scragg
Jonathan Scragg har tilldelats Oscarspriset. Priset utdelades vid årets vinterpromotion.
Oscarspriset tilldelas varje år yngre forskare vid Uppsala universitet, som ”genom vetenskaplig skrift gjort sig mest välförtjänt och inger de bästa förhoppningar om fortsatt vetenskaplig författarverksamhet vid universitetet”. Priset utgörs av avkastningen av Oscar II:s jubelfestdonation och kan delas mellan två lika förtjänta. I år tillfaller priset F.D. Terje Falck-Ytter, institutionen för psykologi och F.D. Jonathan Scragg, institutionen för teknikvetenskaper.
SSF Framtidens forskningsledare: Zhen Zhang
Idag utsågs Zhen Zhang av SSF till Framtidens Forskningsledare. Docent Zhang är en av tjugo unga forskare som vardera får 12 Milj kr i projektbidrag. Projektet handlar om "Halvledarnanosensorteknik för ett smart samhälle".
SSF har utsett sjätte generationens Framtidens Forskningsledare (FFL). Programmet är riktat till svenska eller utländska unga forskare, som bedriver forskning på högsta internationella nivå. Tjugo bidragsmottagare får 12 miljoner var för självständig forskning och de förväntas kunna leda ännu större konstellationer framöver. Därför ingår ett omfattade ledarskapsprogram.
Kungl. Vetenskaps-Societetens Thuréus-pris till Charlotte Platzer Björkman
Kungl. Vetenskaps-Societeten delar idag vid en ceremoni i Museum
Gustavianum i Uppsala ut Thuréus-priset med en prissumma på
100.000 kr till professor Charlotte Platzer Björkman vid institutionen
för teknikvetenskaper, Uppsala universitet.
Charlotte Platzer Björkman får priset med motiveringen för hennes
framstående studier av skapandet av nya material med olika
tunnfilmsmetoder som kan ersätta bl a kadmium i tunnfilmssolceller
Smarta styrbara antenner
Anders Rydberg och mikrovågsgruppen har fått bidrag från Vinnova för att tillsammans med Sivers IMA ta fram nya elektroniskt styrbara antenner för 5G.
Course on Solar Cell Technology